Abstract
An atomic sized probe with large current, provided by spherical aberration corrector, allows us to determine a site of atom column and specify its atomic species using electron energy loss spectrometer in recent analytical microscope [1–3]. Z contrast in scanning transmission electron microscopy (STEM) is commonly obtained by high angle annular dark field electron microscopy (HAADF). On the other hand, backscattered electron (BSE) microscopy also provides Z contrast, which is commonly used in scanning electron microscopy for bulk specimen. The investigations of BSE imaging, with aberration corrected microscope, have been remained because of low yield of BSE. We report BSE imaging with a with large probe current provided by aberration corrected microscope.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
