Abstract
High-resolution scanning electron microscopy (HR-SEM) with backscattered electrons (BSE) under a low accelerating voltage provided images with compositional information about Pt nano-particles with a diameter of approximately 6 nm that were dispersed in mesoporous silica (SBA-15). The dispersion of Pt nano-particles in mesoporous silica was investigated using the BSE imaging method in combination with the broad ion beam (BIB) cross-section fabrication technique.
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