Abstract

Ambient oxygen pressure in a pulsed laser deposition process has been observed to have a critical influence on the compositional, crystalline, and electrical properties of Na0.5K0.5NbO3 (NKN) thin films grown onto polycrystalline Pt80Ir20 and SiO2 (native oxide)/Si(111) substrates. Films prepared at high oxygen pressure (∼400 mTorr) were found to be single phase and highly c-axis oriented. X-ray diffraction θ–2θ scans and rocking curve data show a strong effect of NKN film self-assembling along the [001] direction regardless of the substrate texture. The high dielectric permittivity of 550, low dissipation factor of less than 3%, and high remanent polarization of 12 μC/cm2 indicate the high ferroelectric quality of the fabricated film. The role of the high-energy component of the erosion products has been proven to be crucial to film performance. On the other hand, films grown at low oxygen pressure (∼10 mTorr) have been found to be mixed phases of ferroelectric NKN and paraelectric potassium niobates. These films have shown superparaelectric behavior: 5% tunability at an electric field of 100 kV/cm, losses as low as 0.3%, and excellent stability to temperature and frequency changes.

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