Abstract

Tunneling spectroscopy is used to determine the background impurity distribution in the GaAs buffer layer on GaAs-AlGaAs heterostructures. On a coupled two-dimensional system, consisting of an accumulation layer and an inversion layer separated by a thin AlGaAs barrier, resonant tunneling processes are used to determine the subband energies and the potential profiles in both two-dimensional channels. Comparing the measured peak positions in the resonant tunneling current with the results obtained from self-consistent calculations, the depth dependence of the residual charged impurities in the GaAs buffer is obtained over the first 1200 Å below the AlGaAs-GaAs interface. This information is a crucial sample parameter for all high-mobility two-dimensional electron systems and cannot be obtained from Hall measurements.

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