Abstract
We present the vision of back-end deposited silicon photonics (BDSP) and review works that have been done in this field. Individual aspects of BDSP platform including excimer-laser-annealed polycrystalline silicon, low-loss plasma-enhanced chemical vapor deposition silicon nitride waveguide, modulator, detector, electrical interface, back-end CMOS compatibility, and benefits of the platform are discussed in detail.
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Schedule a callMore From: IEEE journal of selected topics in quantum electronics : a publication of the IEEE Lasers and Electro-optics Society
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