Abstract
The Prediction of flow characteristics of gas through micro-channels is important for MEMS (Micro Electro Mechanical Systems) as a non-testing method. Therefore, the methodology to predict flow characteristics of gas through micro-channels for a wide flow range from incompressible and compressible flow using a f・Re (the product of friction factor and Reynolds number) correlation is developed and proposed. The flow characteristics through micro-channels can be predicted by a f・Re correlation. The detail of the procedure how to apply the f・Re correlation is also documented. In the developed methodology, the form-order Runge-Kutta method is used to integrate the nonlinear ordinary differential equation for pressure and the Regular-Falsi method is also used to find the inlet Mach number. The present results are compared with available experimental results. The results are in excellent agreement with them.
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