B14-O-03Development ofIn-situSample Cells for Scanning Transmission X-ray Microscopy at UVSOR

Abstract

In-situ spectro-microscopic measurements in the soft X-ray region can reveal morphological, physical and chemical processes involving light elements. There are some technical difficulties in soft X-ray microscopes, such as short working distance, low transmittance of the soft X-rays through the sample, and requirement of the vacuum or the He condition. If these difficulties are overcome, scanning transmission X-ray microscopy (STXM) can be a promising technique, considering its characteristics, such as high energy resolving power, high spatial resolution, low radiation damage and 2-dimensional chemical state analysis by using near edge X-ray absorption fine structure (NEXAFS). We have been developing various in-situ sample cells for the STXM, such as an azimuthal rotatable sample cell for polarization dependent measurements [ 1 ], a humidity control sample cell and a liquid flow cell for in-operando electrochemistry [ 2 ]. For example, figure shows a typical liquid flow cell. The sample cell consists of two 100 nm thick silicon nitride membranes sealed with the O-rings. The liquid electrolyte flows in a submicron gap between these membranes, driven by a peristaltic pump from the outside of the STXM chamber via a feed through. By using these sample cells, several in-situ or in-operando experiments have been performed and these results will be reported.