氧化鋅鋁(AZO)薄膜沉積於不同傾斜角之聚對苯二甲酸乙二酯(PET)基板之微結構、光電以及彎曲疲勞特性之研究

Abstract

A flat plate in the deposition stage is designed to have a flexible tilt angle and thus form a variable inclination angle between the ion beam and the direction normal to a PET substrate. Five kinds of inclination angle, 0°, 15°, 30°, 45° and 60° were used to prepare the PET/aluminum-doped zinc oxide specimens in order to examine the effects of the inclination angle and the number of bending cycles on several parameters including the O2-peak intensity ratio (IRO2) from the Electron spectroscopy for chemical analysis, which is identified to be one of the controlling factors in the determinations of electrical, optical, piezoelectric and mechanical properties. The effects of inclination angle on IRO2 and the effects of IRO2 on the parameters of the volume fractions of IRZnO(002) and IRZnO(103) from XRD analyses, the composite grain size and the residual stress in the thin film are investigated systematically. Increases in the inclination angle can raise the IRO2 value; they also reduce the peak intensity, IRZnO. A rise in IRO2 can reduce the volume fraction of IRZnO(002) but raise the residual stress of thin film; it is favorable for the lowering of the composite grain size. The combination of gComposite increase and IRO2 decrease has resulted in an electrical resistivity increase and a carrier mobility decrease. An increase in the residual stress has reduced the fatigue life of bending specimen and the piezoelectric coefficient. The uses of nonzero inclination angle create favorable conditions to raise the transmittance integration over the wavelengths of visible light and the intensities of the three peaks in the photoluminescence spectrum.