AZO/Ag/AZO composite film with high transmittance based on an ultrathin continuous Ag layer obtained via micro oxidation

Abstract

O2 was introduced at the initial stage of Ag layer sputtering to oxidize it slightly to get an ultrathin continuous Ag layer, and an AZO/Ag/AZO (or called AZO/AgOx/Ag/AZO) composite film with high transmittance and conductivity was prepared. The results showed that the O/Ag molar ratio x of AgOx layer increased from 0.02 to 0.2 as the O2 flow ratio increased from 0% to 15%, the lattice mismatch between AZO layer and Ag layer decreased. Both Ag layer crystallization quality and surface quality improved, a continuous ultrathin Ag layer was obtained, of which thickness was less than 10 nm. And the visible transmittance (380–780 nm) of AZO/Ag/AZO composite film improved a lot, while its sheet resistance increased a little. When the O2 flow ratio was 5%, its average transmittance reached 80.95%, its sheet resistance was 12.21 Ω/sq, and the Figure-of-Merit (FOM) got the maximum 9.90 mΩ−1.