Abstract
O2 was introduced at the initial stage of Ag layer sputtering to oxidize it slightly to get an ultrathin continuous Ag layer, and an AZO/Ag/AZO (or called AZO/AgOx/Ag/AZO) composite film with high transmittance and conductivity was prepared. The results showed that the O/Ag molar ratio x of AgOx layer increased from 0.02 to 0.2 as the O2 flow ratio increased from 0% to 15%, the lattice mismatch between AZO layer and Ag layer decreased. Both Ag layer crystallization quality and surface quality improved, a continuous ultrathin Ag layer was obtained, of which thickness was less than 10 nm. And the visible transmittance (380–780 nm) of AZO/Ag/AZO composite film improved a lot, while its sheet resistance increased a little. When the O2 flow ratio was 5%, its average transmittance reached 80.95%, its sheet resistance was 12.21 Ω/sq, and the Figure-of-Merit (FOM) got the maximum 9.90 mΩ−1.
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