Abstract
Two azide-type compounds for thermal-laser photoresists have been investigated. One was an azide-pendant polyvinyl ether) as a binder polymer for positive imaging, and the other was a cyanine dye azide for negative imaging. The positive photoresist, which was composed of nigrosine as an infrared (IR)-absorbing dye and an azide-pendant polyvinyl ether), and the negative photoresist, which was composed of a Novolak resin and a cyanine dye azide as an IR-absorbing dye, were exposed by scanning a light spot of 15 mm from a 780 nm, 30 mW laser, giving sensitivities of 340 and 500 mJ/cm2 for the positive and the negative photoresist.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
