Abstract

Electromagnetic surface waves in the rf and microwave frequency range can be used to produce long large/small-diameter plasma columns. We propose a theory of surface-wave-produced plasmas at two different low-pressure gas-discharge regimes, diffusion and recombination, respectively. For a given regime the axial plasma density profile is specified by two quantities: a numerical parameter σ=ωR/c (ω being the wave frequency, R the tube radius, and c denoting the speed of light) and the collision frequency ν (ν≪ω). Our theory predicts the magnitude of the axial electron number density gradient. The very good agreement between the experimentally measured plasma density gradients and the theoretically calculated ones for diffusion-controlled surface-wave-produced plasma columns confirms the adequacy of the proposed model.

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