Axial intensity distribution of a micro-Fresnel zone plate at an arbitrary numerical aperture.

Abstract

The axial focus number (the number of focal spots along the axial direction) and focus intensity of a micro-Fresnel zone plate (FZP) are analyzed from deep ultraviolet to infrared using the Fourier decomposition, the vectorial angular spectrum (VAS) theory, and the three-dimensional finite-difference time-domain (FDTD) method. For a low-numerical aperture (NA) micro-FZP (NA<0.1), there are multiple axial high-order foci, and the intensity of each focus decreases slowly. However, the intensity of each high-order focus decreases rapidly with NA increasing. For a relatively high-NA micro-FZP (NA>0.3), the axial high-order foci are suppressed and there is one single focus. A fast, precise, and cost-efficient additive manufacturing method, i.e. two-photon polymerization, is used to fabricate high-NA phase-type micro-FZPs. The experiment has validated the phenomenon of linear negative focal shift of a high-NA micro-FZP. This property can be particularly applied in precise measurement of micro-displacement, film thickness, micro/nano step height, and wavelength.