Automatic hammering of nano-patterns on special polymer film by using a vibrating AFM tip

Xiaodong Hong,Yongkang Yang,You Wang

doi:10.1186/1556-276x-7-456

Abstract

Complicated nano-patterns with linewidth less than 18 nm can be automatically hammered by using atomic force microscopy (AFM) tip in tapping mode with high speed. In this study, the special sample was thin poly(styrene-ethylene/butylenes-styrene) (SEBS) block copolymer film with hexagonal spherical microstructures. An ordinary silicon tip was used as a nano-hammer, and the entire hammering process is controlled by a computer program. Experimental results demonstrate that such structure-tailored thin films enable AFM tip hammering to be performed on their surfaces. Both imprinted and embossed nano-patterns can be generated by using a vibrating tip with a larger tapping load and by using a predefined program to control the route of tip movement as it passes over the sample’s surface. Specific details for the fabrication of structure-tailored SEBS film and the theory for auto-hammering patterns were presented in detail.

Highlights

Nano-sized patterns can be created on sample surface using a variety of different surface modification techniques
As a complement to conventional photo and electron-beam lithography, atomic force microscopy (AFM) nanolithography appears to be a unique tool with nanometer accuracy
We have demonstrated that poly (SEBS) monolayer thin films which possess a well-ordered hexagonal spheres nanostructure [18] are suitable for hammering nanopatterns in their surfaces by using vibrating AFM tip manually

Summary

Introduction

Nano-sized patterns can be created on sample surface using a variety of different surface modification techniques. High resolution AFM nanolithography provides the ability to create various specialized site-specific nano-patterns or localized functional surface structures; with the integration of additional measurement modules, it allows for the physical and morphological qualities of surface undulations to be immediately characterized. Various hard or soft materials can be directly removed by the typical mechanical [9,10] or thermomechanical [11] scratching technique In this field, soft polymer oxide mounds with nanometer scale on the Si(100) surfaces exposed to air by utilizing an AFM tip in tapping mode. While Gan et al [8] proposed automatic patterning with AFM through local anodic oxidation, with numerous oxide structures being successfully created to demonstrate the ability of this low cost and accurate system

Methods

Results

Conclusion