Abstract
Clocking of lens elements is frequently used as an effective method of compensating for two-dimensional tolerances such as material inhomogeneity and surface figure errors. Typically, the lens designer has to determine the optimum angles of rotation by manually modeling lens element clocking in the commercial optical design software because the nature of errors resolved by lens clocking does not lead to good convergences for clocking optimization. In this paper, a method of automatic clocking optimization is developed. The method is implemented using a combination of particle swarm optimization algorithm and commercial optical design software. The optimum angles of rotation and predicted imaging performance are automatically calculated using this method. Methods of implementation and optimization examples are also given.
Highlights
Clocking of lens elements is frequently used to achieve a near-perfect image quality of lithographic lens with a high numerical aperture (NA)
We propose a method of clocking optimization using a combination of particle swarm optimization (PSO) and commercial optical design software
We propose to use the PSO algorithm to automatically calculate the optimum rotation angles of lens elements. 2.1 Particle swarm optimization (PSO) PSO is originally attributed to Kennedy, Eberhart, and Shi [8] and was first intended for simulating social behavior as a stylized representation of the movement of organisms in a bird flock or fish school
Summary
Clocking of lens elements is frequently used to achieve a near-perfect image quality of lithographic lens with a high numerical aperture (NA). The lens designer has to determine the optimum angles of rotation by manually modeling the clocking of lens elements in commercial optical design software because conventional software tools have poor optimization ability for compensating for material inhomogeneity and surface figure errors. Commercial optical design software such as CodeV and Zemax applies singular value decomposition algorithm to determine the most effective alignment compensators and uses an alignment optimization feature to determine the magnitude and direction of allowed system adjustments (compensators) to recover as much nominal system performance as possible [4] This process is called computer-aided assembly adjustment, which is very effective in compensating for almost all 1D tolerances but not 2D tolerances. We propose a method of clocking optimization using a combination of particle swarm optimization (PSO) and commercial optical design software Using this method enables the automatic calculation of the optimum rotation angles and predicts imaging performance
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