Abstract

Automated crystal orientation measurement (ACOM) in the SEM by interpreting backscatter Kikuchi patterns (see Figure) has become a standard tool of quantitative texture analysis in materials science during the last decade. A Radon transformation of the diffraction pattern, in combination with a 1D fast Fourier transformation, enables the fast extraction of the positions of Kikuchi bands. The high‐frequency coefficients of the 1D FFT are used to define pattern quality as a measure of lattice imperfection and residual stress of the real crystal structure.

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