Automated data monitoring of MEMS cleanroom parametric requirements

Abstract

<p>Cleanroom parameters such as temperature, relative humidity and particle count are vital in maintaining cleanliness. People and machines working inside the cleanroom are main contributors for the sudden changes of the separameters. Measurements and monitoring of these parameters are therefore necessary to reduce rejects and downtime in the production of micro-electro-mechanical systems (MEMS). This paper presents a method of developmentof an automated data monitoring of MEMS cleanroom parametric requirements. The prototype developed uses DHT11 sensor and Sharp dust sensor for measuring the temperature, humidity and particle count respectively which are displayed in an LCD display. These parameters are recorded through a data logger for analysis and control. Additionally, agraphical user interface was also developed using visual studio for the working personnel and for supervisory monitoring and control. As a result, the possible quality compromise in the production of MEMS is detected when the monitored parameters are beyond the range.</p>