Abstract
Introduction. By volume of material produced, optical disc manufacturing is the world's large nanotechnology industry, far surpassing semiconductors and magnetic disks. The development of various optical disc media has introduced a variety of challenges, which necessitate viewing the geometrical structure of the bumps, pits, or grooves on the surface of the discs. The Atomic Force Microscope (AFM) has the resolution and sensitivity needed for device analysis, but in the past has been limited by magnification errors, image distortion, data handling, and calibration. Furthermore, the common measurement procedure for AFM images consists of manual dimensional measurements. This introduces error and limits the number of measurements taken at one time. We have developed an automated process, which overcomes these limitations and provides a comprehensive approach to feature measurement, data analysis, calibration, and reporting.
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