Au-pattern fabrication on a cellulose film using a polyurethane acrylate mold

Abstract

This paper deals with a gold micro-patterning process on a cellulose film using a polyurethane acrylate (PUA) mold. Recently, cellulose electro-active paper (EAPap) has been found to be a smart material that can be used for biodegradable sensors, actuators and MEMS devices. However, the hydrophilic and flexible characteristics of cellulose EAPap are major drawbacks for applying a conventional lithography process to fabricate MEMS devices. To overcome these drawbacks, an unconventional lithography process, the so-called micro-transfer printing technique based on a PUA mold, was employed. A master pattern for the PUA mold was fabricated using the conventional photolithography process with an SU-8 photoresist, and the replica of the master pattern was fabricated using PUA. Gold was deposited onto the PUA mold, and a mercaptopropyltrimethoxysilane (MPTMS) self-assembly monolayer was made on the gold surface to securely transfer the gold layer onto the cellulose film. The effect of MPTMS was investigated. Further investigation of the factors to optimize the repeated stamping process will lead to a practical, reusable mold.