Abstract

In this work the Auger electron spectroscopy (AES) sputter depth profiling technique for binary solids has been discussed and exemplified by its application to reveal composition profiles generated in Ni 0.7Mo 0.3 by pre-bombardment with Ar +-ions of 1 through 5 keV. Two element-specific, surface-sensitive Auger transitions are employed to monitor the surface composition. The linear correlation between the Auger intensities provides the relative sensitivity factor for the quantification of AES data. A model proposed by Ho and co-workers is reformulated for the conversion of the measured temporal variation of surface concentration C s( t) into the original composition profile C( x). Radiation-enhanced diffusion caused by high-energy ion bombardment turns sputter depth profiling into an underdetermined inverse problem. On the other hand, experiments show that the strong preferential sputtering effect accompanying low-energy sputter may veil the detail of the composition profiles. An intermediate energy between about 100 and 300 eV is found to be optimum for the purpose of sputter depth profiling.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.