Abstract
An advanced configuration for scanning Auger microscopy is described. Results are presented to demonstrate the ability to form small probes at low primary energy, to detect the Auger signal with a high signal-to-noise ratio, to determine elemental distributions in low Z materials with a good spatial resolution and to analyze small particles.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
