Abstract

Energy spectra have been measured of the secondary electrons in the range of 800 to 1800 eV emitted from an Al(110) single crystal by bombardment of 0.5 to 2.4 MeV H+ and He+ beams. At electron energies of 1400 eV and below, the aluminum KLL Auger signal is observed. Its intensity is proportional to the K-shell ionization cross section over the measured energy range. The intensity of the background electrons is proportional to the cross section for beam energies up to 0.5 MeVamu. The intensity of the secondary electrons depends on the alignment of the incident beam: under (axial) channeling conditions it is 2 to 4 times lower than under random incident conditions. Angular scans of the intensity of the secondary electrons are similar to those of the backscattered ions. The use of ion-induced Auger electron spectroscopy in combination with channeling for structural analysis is discussed.

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