Abstract
We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.
Highlights
We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope
We investigated the e-beam controlled epitaxial crystallization of an amorphous LaAlO3 (a-LAO) thin film that had a conductive interface with a SrTiO3 (STO) substrate (Moon et al 2016)
The a-LAO thin film was grown on TiO2-terminated STO substrates at room temperature by pulsed laser deposition in an oxygen atmosphere
Summary
We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. Description Lithography techniques utilizing various sources including light, X-rays, electron beams (e-beams), and ion beams have been investigated to obtain better performance (Levenson et al 1982; Ehrfeld and Lehr 1995; Watt et al 2005). E-beam lithography is one of the most promising methods of fabricating nanostructures because of its excellent spatial resolution (Tseng et al 2003; Altissimo 2010). Controlled nanostructure sculpting can be conducted using recent advances in aberration-corrected scanning transmission electron microscopy (STEM) (Song et al 2011; Jesse et al 2015).
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