Atomically Resolved Imaging of Si(100)2×1, 2×1:H and 1×1:2H Surfaces with Noncontact Atomic Force Microscopy

Abstract

Atomically resolved imaging of Si(100)2×1-clean, Si(100)2×1:H-monohydride and Si(100)1×1:2H-dihydride surfaces using a noncontact atomic force microscope (NC-AFM) is reviewed. These experimental results clarify that our original NC-AFM had lateral resolution of about 0.01 nm and could image tilted dangling bonds of the Si(100)2×1-clean surface, individual hydrogen atoms of the Si(100)2×1:H-monohydride surface, and atomic strain around missing dimers of the Si(100)2×1-clean surface. In addition, the NC-AFM image pattern of the Si(100)1×1:2H-dihydride surface can be changed from 1×1 through 2×1 to 1×1 by decreasing the tip-sample distance. From these results, it was concluded that the NC-AFM could mechanically induce phase transition of surface reconstruction from the Si(100)1×1:2H to Si(100)2×1:2H-dihydride surface due to self-organization, and could also pull up the nearest hydrogen atoms one by one by increasing the attractive force between the tip apex atom and sample surface atom.