Abstract
Surface reactions of indium antimonide (InSb) nanowires and nanosheets, including oxidation, often result in the performance deterioration of semiconductor devices. In this study, we characterized the oxide films of InSb nanowires/nanosheets at the atomic level. The oxide film on the nanowire is composed of In2O3, which grows in islands and layers along the (1¯11) and (002) planes of the matrix. The oxide film on the lateral side of the InSb nanosheet was amorphous and thinner than the oxide film on the nanowire. In2O3 grew via the external diffusion of indium ions. The oxide films on the InSb nanowires and nanosheets are closely related to the InSb surface features.
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