Atomic structure, electrical properties, and infrared range optical properties of diamondlike carbon films containing foreign atoms prepared by pulsed laser deposition

Abstract

We investigated the atomic structure, electrical, and infrared range optical properties of diamondlike carbon (DLC) films containing alloy atoms (Cu, Ti, or Si) prepared by pulsed laser deposition. Radial distribution function (RDF) analysis of these films showed that they are largely sp3 bonded. Both pure DLC and DLC + Cu films form a Schottky barrier with the measuring probe, whereas DLC + Ti films behave like a linear resistor. Pure DLC films and those containing Cu exhibit p-type conduction, and those containing Ti and Si have n-type conduction. Photon-induced conduction is observed for pure DLC, and the mechanism is discussed in terms of low-density gap states of highly tetrahedral DLC. Our results are consistent with relative absence of gap states in pure DLC, in accordance with theoretical prediction by Drabold et al.37 Temperature dependence of conductivity of DLC + Cu shows a behavior σ ∞ exp(−B/T1/2), instead of the T−1/4 law (Mott–Davis law). Contributions from band-to-band transitions, free carriers, and phonons to the emissivity spectrum are clearly identified in pure DLC films. The amorphous state introduces a large contribution from localized states. Incorporation of a small amount of Si in the DLC does not change the general feature of emissivity spectrum but enhances the contribution from the localized states. Cu and Ti both enhance the free carrier and the localized state contributions and make the films a black body.