Abstract
Carbonaceous materials such as carbon nanotubes (CNT) and graphene attract attention as new large scale integration materials from various characteristics. The analysis of atomic scale structure requires high spatial resolution and high detection efficiency when it is integrated as a real device. Therefore, we analyzed these materials by laser‐assisted three‐dimensional atom probe. However, in the case of analyzing organic materials, there are some problems: carbon cluster ions are generated at field evaporation, the focused ion beam process of needle‐shape sample is difficult, and so on. Moreover, the field evaporation of CNT occurs toward unfavorable direction. In this study, we propose the improvement of the focused ion beam processing. We evaluated the measurement condition to reduce carbon cluster ions. And the field evaporation of CNT is simulated for obtaining appropriate measurement condition. In the results section, the ideal needle‐shape sample was prepared, and the wavelength dependence of the field evaporation was confirmed. Moreover, it revealed that it was important to change the distance between the specimen apex and the local electrode in the three‐dimensional atom probe analysis of CNT. Copyright © 2012 John Wiley & Sons, Ltd.
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