Abstract
SnO2-based chemoresistive sensors integrated in complementary metal-oxide-semiconductor technology were functionalized with ultrasmall Pt nanoparticles, resulting in carbon monoxide sensing properties with minimized humidity interference.
Highlights
The surface reactivity of metal oxide materials can be enhanced by nanoparticle decoration, which is of crucial importance in catalysis and chemical sensing applications
Size-selected Pt nanoparticles were directly deposited on carbon transmission electron microscopy (TEM) support films, Si substrates for atomic force microscopy (AFM) characterization (Bruker Multimode 8 in tapping mode), silicon nitride TEM support films covered with SnO2 thin films, membrane-based TEM heating chips with mechanically-transferred SnO2 nanowires and CMOSintegrated SnO2 thin film devices
Pt nanoparticles were synthesized by magnetron sputtering inert-gas condensation and their size distribution was adjusted by fine-tuning the deposition parameters, in particular the magnetron power, the gas flow and the quadrupole mass filter (QMF) settings, resulting in size control in the range of 1 nm to 5 nm
Summary
The surface reactivity of metal oxide materials can be enhanced by nanoparticle decoration, which is of crucial importance in catalysis and chemical sensing applications. Size-selected Pt nanoparticles with an average diameter below 2 nm were fabricated by a solvent-free gas-phase synthesis approach and deposited onto the SnO2 sensing layer surfaces, which resulted in carbon monoxide sensing properties with minimized humidity interference. The atomic-scale structure of ultrasmall Pt nanoparticles supported on SnO2 was studied by in situ transmission electron microscopy, performing heating experiments in reactive gas atmosphere relevant for sensor operation. It is of vital importance to study the atomic-scale morphology of SnO2–Pt nanomaterials subjected to reactive gas atmospheres at elevated temperatures to obtain more detailed knowledge on the structure–property relationships in this material system. The substrate holder was rotated at 2 rpm to ensure homogeneous nanoparticle deposition
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