Abstract
The origin of the X-ray CTR scattering have been described in brief in order to make it clear why the X-ray CTR scattering measurement can reveal the interface structure. Then, some examples of the results obtained by the X-ray CTR scattering measurement have been shown. The distributions of group-V and III atoms in InP/GaInAs/InP double-heterostructure samples have mainly been discussed. The change of the distribution of As at the interface with the change of H 2 -purge time has been quantitatively shown at an atomic scale by the X-ray CTR scattering measurement, which has demonstrated the high resolution and significance of the X-ray CTR scattering measurement in the investigation of the III–V compound semiconductor heterostructures. The distribution of group-III atoms has also been investigated by the X-ray CTR scattering measurement. The results have suggested that the interface has not been so abrupt as expected, and it has been more difficult to control the distributions of group-III atoms than group-V atoms. The results have shown how important the observation by the X-ray CTR scattering has been to understand the interface structure.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
