Abstract
Abstract In this paper, the possibilities and intrinsic physical limits to atomic resolution electron tomography are discussed. It is shown that atomic resolution electron tomography is in principle possible and may provide atom position coordinates with sufficient precision to use as input data for theoretical ab-initio calculations. For amorphous materials which are subject to radiation damage it may require a lower voltage and the use of a C s and C c corrector. For perfect crystalline samples the projected structure can be reconstructed from exit waves using the channeling theory. Combining the reconstructions obtained from different zone axis orientations then yields the 3D atomic structure. The most difficult objects will be semicrystalline materials where strong dynamic scattering interferes with weak signals from the aperiodicity. Here we suggest to use a new technique called precession laminography. Finally, doubt is raised about the practical usability of optical sectioning by HAADF STEM.
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