Abstract

This chapter introduces the principles of high-resolution electron microscopy (HREM) and scanning transmission electron microscopy (STEM). These are the two major techniques for atomic resolution imaging of nanostructures, certain types of crystal defects and interfaces, as well as metrology in electronic and magnetic devices when atomic resolution is needed. In STEM, atomic resolution imaging using an annular dark-field detector can be combined with analytical techniques, such as energy-loss spectroscopy (EELS, which gives similar information to soft X-ray absorption spectroscopy), energy dispersive X-ray spectroscopy (EDS), and nanodiffraction, for composition and crystallographic analysis.

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