Abstract
ZnO thin film was deposited on ZrO2 plates by Atomic Layer Deposition, and the ZrO2/ZnO plates were annealed at 200 °C, 225 °C, 250 °C and 275 °C in Ar environment for 2 h. The characterization results showed that a higher annealing temperature resulted in increased grain size, surface roughness and hydrophilicity. The antibacterial and bioactive properties of ZrO2/ZnO thin-film composite were studied with Streptococcus Sanguinis (SS), Bifidobacterium (BB), and Porphyromonas Gingivalis (PG) bacteria. The ZnO thin film annealed at 250 °C exhibited the best biocompatibility and antibacterial performance.
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