Abstract
We report on the growth and electrochemical properties of nanoscale (20-35 nm) yttria-zirconia alloys synthesized using a laminate approach via atomic layer deposition. We observed metal oxide layer interdiffusion in relatively long-period (∼10 nm) nanolaminates by depth profiling analysis after 950°C anneals. Short-period (< 1 nm) nanolaminates were amorphous as deposited but appeared to be completely interdiffused with a polycrystalline, tetragonal structure after similar anneals. Electrochemical characterization of annealed, short-period nanolaminate yttria-stabilized zirconia (YSZ) films containing 3 mol % Y 2 O 3 (3YSZ) indicated significant enhancement of total electrical conductivity compared to reported bulk values for this composition.
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