Abstract
TaN thin film was deposited on a Ti–6Al–4V plate, a widely used material for the dental implant. The surface morphology and thickness of the TaN thin film were investigated by Scanning Electron Microscopy (SEM). The surface chemical states and elemental composition were studied by X-ray photoelectron spectroscopy (XPS). The crystal structure was determined by X-ray Diffraction (XRD) patterns. The water contact angles of both Ti–6Al–4V and TaN surface were measured. The anti-corrosion behaviors of Ti–6Al–4V and TaN were studied through electrochemical characterization in the artificial saliva environment, and the anti-bacteria behaviors were investigated with both bacteria of E. coli and S. aureus.
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