Abstract
Deposition of MgO thin film on nanocrystalline yttria-stabilized zirconia microtubes was investigated. The microtubes were prepared by self-formation from threads drawn directly from zirconium butoxide [Zr(OBu)4] precursor and heat treated at 800°C. The tubes possessed 100% tetragonal phase, their typical outer diameter was 50μm, inner diameter 30μm and length 1cm. MgO films were deposited from β-diketonate-type precursor 2,2,6,6-tetramethyl-heptanedionato-3,5-magnesium(II) at 220°C by atomic layer deposition. Thickness of MgO film on microtubes was 15.8nm and growth rate 0.105Å/cycle.
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