Abstract
Thin solid films consisting of ZrO2 and Fe2O3 were grown by atomic layer deposition (ALD) at 400 °C. Metastable phases of ZrO2 were stabilized by Fe2O3 doping. The number of alternating ZrO2 and Fe2O3 deposition cycles were varied in order to achieve films with different cation ratios. The influence of annealing on the composition and structure of the thin films was investigated. Additionally, the influence of composition and structure on electrical and magnetic properties was studied. Several samples exhibited a measurable saturation magnetization and most of the samples exhibited a charge polarization. Both phenomena were observed in the sample with a Zr/Fe atomic ratio of 2.0.
Highlights
Thin solid films consisting of ZrO2 and Fe2O3 were grown by atomic layer deposition (ALD) at 400 °C
Doped ZrO2 has been a subject of interest because of several potential applications, for example, in microelectronics as a memory material [1]
ZrO2 doped with various chemical elements has been studied for several applications and different processes have been employed to prepare the samples
Summary
Doped ZrO2 has been a subject of interest because of several potential applications, for example, in microelectronics as a memory material [1]. Doping a dielectric film with a magnetic material might provide the structural distortion required to stabilize the ferroelectric phase resulting in a multiferroic material, which would allow an additional degree of freedom in device design [2]. ZrO2 doped with various chemical elements has been studied for several applications and different processes have been employed to prepare the samples. Magnetic properties of PLD-synthesized ZrO2, doped with Co, Fe, Mn or Ni, have been studied [4], showing that doping ZrO2 with Mn results in a significantly higher saturation magnetization than doping ZrO2 with the other transition metals studied. Fe–ZrO2 nanocomposite thin films have been synthesized using a solid state reaction between the Zr and Fe2O3 layers, and their composition, structure, chemical stability and magnetic properties were characterized
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