Abstract
In a specially modified apparatus for secondary ion mass spectrometry (SIMS), silver-coated and uncoated silicon single crystals were sputtered by means of unfocused neutral particle bombardment. The roughnesses of the craters obtained were observed by atomic force microscopy (AFM), in order to examine changes of the surface topography as a function of eroded depth. Silicon was found to amorphize and thus became smooth under non-focused neutral particle bombardment, while on a silver surface holes and humps appeared. This different behavior is explained by the differences in the binding of the two materials.
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