Abstract
A cantilever array for dynamic mode atomic force microscopy (AFM) is presented, the vertical displacement of which is analyzed by the detection of displacement currents in the electrodes. Each cantilever in the array consists of an actuation part that allows an independent vertical movement, and a sensor part. The lateral distance between the tips of the different cantilevers is fixed to 10 µm. When operated as an actuator, a voltage is applied between the silicon membrane and the underlaying electrode. Due to the resulting coulomb forces, the vertical position of the tip is controllable. The reaction time in this mode is shorter than the response time of a piezostack. The sensor part, on the other hand, allows the device to work in dynamic mode without a laser deflection system. The vertical resolution achieved is below 1 nm. The dependence of force distance curves on the excitation amplitude is shown.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
