Atomic force microscopy dynamic modes: modeling and applications

Abstract

This paper contains a review of the development in modeling and applications ofatomic force microscopy (AFM) modes. AFM is commonly used for atomic andnano-scale surface measurement. Two operational modes of AFM exist: static modeand dynamic mode. In dynamic AFM mode, a cantilever is driven to vibrate byits holder or the sample. The changes of cantilever vibration parameters due totip–sample interaction are used to reveal surface properties of samples. Analyticaland numerical models that can accurately simulate surface-coupled cantileverdynamics are essential for explaining AFM scanning images and evaluating a sample’smaterial properties. The objective of this paper is to categorize the existing AFMdynamic modes and measurement techniques in terms of cantilever deflection andexcitation mechanism, summarize AFM cantilever models presented in the literature,and demonstrate the applications of these models in AFM mode simulations.Based on the relations between cantilever responses and tip–sample interaction,methods for quantitative evaluation of a sample’s mechanical parameters aredescribed.