Abstract
This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures and nanodevices. Field emission theory is introduced in this paper, which provides theoretical explanation for AFM deposition. Dot matrixes are fabricated by AFM deposition on three different substrates, Si, Au and GaAs. Differences of deposition on the three substrates are discussed. AFM deposition has many practical applications. For example, AFM deposition can be used to solder nano components together to improve electrical properties of nanodevices. Besides nanosoldering, AFM deposition can also be used in fabrication of nanodevices. Thus AFM deposition is a valuable research field for future massive applications of nanodevices.
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