Abstract

Data on sputtering, ion reflection from surfaces, and trapping have been collected, evaluated, and compiled into tables and complementary graphs for presentation as a revision and addition to Sections D.1, D.5, and D.6 of Atomic Data for Controlled Fusion Research (ORNL-5206, -5207), issued in 1977 as a compilation of atomic and molecular cross sections of interest to controlled thermonuclear research. Section D.1 presents, in self-contained data sets, sputtering coefficients as functions of various incident and target materials, temperatures, angles of incidence, and incident energies. Other relevant sputtering data are also compiled. Section D.5 includes data on particle and energy reflection coefficients as functions of impacting and target materials and angles of emergence or incidence. The energy distributions of neutrals plus ions are also covered in Section D.5. Contained in Section D.6 are data on trapping coefficients, trapped fluence, reemission rates, and replacement cross sections and efficiencies. Data sets are composed of tabular data, computer-generated graphs, estimates of the accuracy or confidence level of the data, bibliographical references, and explanatory notes.

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