Atmospheric Pressure Plasma Sources for Plasma Polymerization and Large Area Treatment

Abstract

As a dry processing method, plasma polymerization is recognized as important method to deposit conductive polymer films onto a wide variety of substrates, which is applicable to display and gas sensor materials 1. Nonetheless, to obtain high-quality conductive polymer film using plasma sources, especially atmospheric pressure plasma jets (APPJs), new efforts should be aimed at overcoming the problems of traditional APPJs based on weakly ionized discharge with low plasma density and difficulty for plasma discharge control. Therefore, it is important to increase the plasma density for effective plasma polymerization using APPJs for large area treatment. We have recently reported a new synthesis method using a APPJ device, where singlecrystalline plasma-polymerized pyrrole (pPPy) nanomaterials were successfully grown on various substrates 2. However, the physics of plasma for plasma polymerization and large area treatment have not yet been studied systematically in terms of the guided glass tube sizes and the number of jets, which constitute arrays jets. In this study, we numerically examine the plasma discharge behavior and measure the characteristics of polymers, such as poly-anilne, -pyrrole, -thiophene grown by APP polymerization technique for large area treatment. The detailed mechanism of plasma physics and the property of the synthesized polymers are under studied and will be discussed in detail.