Abstract

We present He atmospheric-pressure gas-breakdown phenomena with radio frequency (RF) voltages in the frequency region from a few tens MHz to 100 MHz. The gas-breakdown voltage for RF and very high frequency (VHF) discharges is considerably lower than that for the DC discharge, and the gas-breakdown voltage is effectively reduced to be as low as 160 V in VHF region. The discharge characteristics drastically change with increasing discharge-voltage frequency, and strong emisson is highly loclized in front of the power- and ground-electrode in the VHF discharges. The lowering gas-brakdown voltage and the localized emission-profile are well explained by the effect of the charged-particle confinement in a micro dishcarge-space.

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