Abstract
Atmospheric pressure chemical vapour deposition of titanium tetrachloride and niobium pentachloride with di- tert-butyl selenide at 550 °C was investigated for different precursors’ flow rates. Scanning electron microscopy of the films showed that they were composed of two different kinds of plate-like crystallites. Point wavelength dispersive X-ray (WDX) analyses of the crystallites revealed that they either had the NbSe 2 or the TiSe 2 composition. The presence of the two phases was confirmed by X-ray diffraction (XRD) and the calculated cell parameters indicate that niobium or titanium was not incorporated into each others’ lattice. WDX and XRD analyses highlighted how the NbSe 2:TiSe 2 ratio in the composite films could be controlled by precursor flow rate.
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