Abstract
Cr 2 O 3 films have been deposited on glass substrates by atmospheric pressure chemical vapour deposition reaction of chromyl chloride with either water, ethyl acetate, methanol or ethanol. Films were deposited in the temperature range 450°C - 600°C. The Cr 2 O 3 films were characterised by glancing angle XRD, SEM and X-ray photoelectron spectroscopy. These analyses showed that single-phase Cr 2 O 3 was obtained at all deposition temperatures.
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