Abstract
Transparent zinc oxide (ZnO) thin films have been successfully synthesized on poly (methyl methacrylate) (PMMA), polycarbonate (PC), and polyethylene terephthalate (PET) substrates by atmospheric plasma deposition in ambient air at room temperature. The structural, optical and electrical properties of the ZnO films as well as their adhesion to the polymer substrates were investigated for various deposition conditions. The film surface exhibited a dome-shaped topography comprised of nanometer-sized grains. The size of both the domes and the grains became larger as the plasma power increased. The visible transmittance increased above 95% with decreasing plasma power. The resistivity exhibited a wide variation in the range of 102–108ohmcm. The adhesion energies to PMMA varied from 0.2 to 1.5J/m2 with increasing plasma power. While a finer grain structure achieved with lower plasma power was preferable for higher transmittance, it resulted in lower adhesion to the plastic substrates. The study demonstrated the feasibility of depositing semiconducting transparent ZnO films on polymer substrates at low temperature in ambient air using atmospheric plasma deposition.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
