Atmospheric Line Plasma Source using Asymmetric Barrier Discharge

Abstract

Summary form only given. Atmospheric plasma has a large potential for high speed and low cost processing in industrial use because it does not need vacuum chamber and pumping system. Moreover, atmospheric plasma has higher ion and reactive species densities so that also helps high speed processing. But it is not easy to generate large-sized plasma under the atmospheric pressure. In this work, to realize atmospheric long line plasma source, asymmetric barrier discharge source and high voltage pulse generator are designed and developed. With our new line plasma source, a 100 cm long atmospheric plasma can be generated in atmospheric pressure. To generate large amount of ozone, oxygen mixed helium gas is used as a plasma gas. The gas flow rates are 0.5 and 30 L/min for oxygen and helium, respectively. In this study, to generate uniform and stable plasma, some electrode gap length and combination of electrode shapes were tested. To demonstrate the effect of ozone, large area and high speed hydrophilization of plastic surface are performed. The degree of hydrophilization was measured by surface tension measurement pen.