Abstract
We present a method to measure the surface profile of hard X-ray reflective optics with nanometer height accuracy and sub-millimetre lateral resolution. The technique uses X-ray near-field speckle, generated by a scattering membrane translated using a piezo motor, to infer the deflection of X-rays from the surface. The method provides a nano-radian order accuracy on the mirror slopes in both the tangential and sagittal directions. As a demonstration, a pair of focusing mirrors mounted in a Kirkpatrick-Baez (KB) configuration were characterized and the results were in good agreement with offline metrology data. It is hoped that the new technique will provide feedback to optic manufacturers to improve mirror fabrication and be useful for the online optimization of active, nano-focusing mirrors on modern synchrotron beamlines.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
