Abstract
In this work, we will introduce the Bessel beam asymmetry control for glass dicing applications. Asymmetrical Bessel beam can be used to form modifications inside the glass with dominant crack propagation direction optimizing the dicing speed and sample separation forces. The Bessel beam asymmetry control will be demonstrated by applying axicon tilt operations and other approaches including the beam shaping with amplitude masks. Further, the Bessel beam dicing process will be compared to conventional processing techniques such as mechanical dicing (score and brake method), diamond saw and water jet cutting.
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