Abstract
The performance and characteristics of a cathodic arc plasma source,consisting of a titanium cathode, an anode with and without a tungstenmesh, and a coil producing a focusing magnetic field between the anodeand cathode, are investigated. The high transparency and large area ofthe mesh allow a high plasma flux to penetrate the anode from thecathodic arc. The mesh helps to decrease the arc resistance and theignition voltage of the cathodic arc in the focusing magnetic field, and toincrease the life of the source, which means that the source makesthe cathodic arc easily and greatly stabilized during the operation whena focusing magnetic field exists in the source.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
