Abstract
Ultra-precision work coordinate system (WCS) setting by measuring the relative distance between the workpiece and the tool is a key element to further improve the accuracy of ultra-precision machine tools. Touch probe is the most widely used WCS method in conventional machining, yet it cannot be used in ultra-precision machining (UPM) applications due to the nature of contact with the workpiece, potentially resulting in surface damage or tool breakage. Furthermore, indirect methods, such as a touch probe, require the sensor to be replaced with a tool after setting the work coordinate. This induces uncertainty. In this paper, the repeatability of the newly proposed non-contact and direct WCS method using electrical breakdown (E.B.) was evaluated for the use in UPM. The standard deviation of the tool positions after performing the method 11 times was under 40 nm. Using a tungsten carbide tool and aluminum workpiece, the proposed method’s repeatability and surface damage were investigated.
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